CaltechAUTHORS
Published February 2, 1987 | Version public
Journal Article Metadata-only

Energy cost to sputter an atom from a surface in keV ion bombardment processes

Creators

  • 1. ROR icon Pennsylvania State University
  • 2. ROR icon California Institute of Technology
  • 3. ROR icon Division of Physics
  • 4. ROR icon California State University, Fullerton
  • 5. ROR icon Naval Postgraduate School

Abstract

We propose that the energy cost to remove one atom from the surface during ion bombard-ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.

Additional Information

© 1987 Elsevier Science Publishers B.V. Received 23 September 1986; accepted for publication 16 October 1986. Available online 5 September 2002. The authors would like to acknowledge their respective National Science Foundation grants. D.E.H. thanks the Foundation Research Program of the Naval Postgraduate School and B.J.G. appreciates support from the IBM Corporation and the Camille and Henry Dreyfus Foundation. Helpful comments were received from R. Kelly.

Additional details

Identifiers

Eprint ID
51148
Resolver ID
CaltechAUTHORS:20141103-071903427

Funding

NSF
Naval Postgraduate School Foundation Research Program
IBM Corporation
Camille and Henry Dreyfus Foundation

Dates

Created
2014-11-03
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Updated
2021-11-10
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