Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer

We describe and present detailed performance characterizations for an enhanced version of our MEMS-Based Phase-Shifting Interferometer (MBPSI) that achieves 13 times denser motion reconstruction than our original system. We measure the noise level to be ≤±6 nm λ for a 660 nm laser), and the frequency-resolution to be ≤ 0.03Hz for 31Hz motion captured at 300Hz. We have successfully tracked a piezo-based actuator, driven with an arbitrary waveform composed of transients ≤10Hz.