Published June 1995
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Silicon microstructures and microactuators for compact computer disk drives
Abstract
Silicon micromachining techniques offer many exciting opportunities for fabricating both passive microstructures and active electromagnetic microactuators for significant form factor reduction and increase in recording density of future magnetic recording rigid disk drives. In this overview paper, the authors have presented some recent results and novel product concepts.
Additional Information
© 1995 American Control Conference. The work presented here was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). The results are the combined efforts of our many colleagues, Amish Desai, Wen Hsieh, Rsanan Miller, Weilong Tang, Viktoria Temesvary and Shuyun Wu.Attached Files
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Additional details
Identifiers
- Eprint ID
- 95091
- Resolver ID
- CaltechAUTHORS:20190429-151824998
Funding
- University of California
- Applied Magnetics
- Hewlett-Packard Company
- IBM
- Magnacomp
- Maxtor
- Quantum
- Read-Rite
- Seagate Technology
- National Storage Industry Consortium
Dates
- Created
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2019-04-29Created from EPrint's datestamp field
- Updated
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2021-11-16Created from EPrint's last_modified field