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Published October 24, 2016 | Version Published
Book Section - Chapter Open

Hydraulic supports for polishing TMT M3MP

Creators

  • 1. ROR icon Changchun Institute of Optics, Fine Mechanics and Physics
  • 2. ROR icon TMT Observatory

Contributors

Abstract

For polishing the ultra-thin TMT M3MP, a polishing support system with 18 hydraulic supports (HS) is introduced. This work focuses on the designing and testing of these HSs. Firstly the design concept of HS system is discussed; then mechanical implementation of the HS structure is carried out, with special consideration of fluid cycling, work pressurization and the weight component. Afterward the piping installation and the de-gas process for the working fluid are implemented. Pressurization and stiffness are well checked before system integration for the single HS unit. Finally the support system is integrated for the polishing process.

Additional Information

© 2016 SPIE The International Society for Optical Engineering. This work is financially supported by Natural Science Foundation of China No.61210015 and Chinese National 973 program No. 2011CB013205.

Attached Files

Published - 968208.pdf

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Additional details

Identifiers

Eprint ID
72678
Resolver ID
CaltechAUTHORS:20161209-065158463

Funding

National Natural Science Foundation of China
61210015
Chinese National 973 program
2011CB013205

Dates

Created
2016-12-09
Created from EPrint's datestamp field
Updated
2021-11-11
Created from EPrint's last_modified field

Caltech Custom Metadata

Series Name
Proceedings of SPIE
Series Volume or Issue Number
9682