3D silicon electrodes with built-in glass capillaries for dielectrophoretic single-cell positioning and anaylisis

We present microfluidic designs for dielectrophoretic positioning of single cells and their subsequent analysis based on 3D silicon electrodes featuring built-in capillaries. The designs are presented through numerical simulations as well as experimental validations showing effectiveness of dielectrophoretic forces in trapping single cells. Single-cell experiments are also demonstrated including viability assays and ionophore-mediated intracellular calcium flux assays. Seal resistance measurements between the capillaries and cells trapped, which are essential for patch-clamp assays, are reported.