Published 1983 | Version public
Journal Article

Ion Mixing

Abstract

Ion mixing is a novel processing technique for the fabrication of new materials with unique properties. The phenomenon is also often responsible for redistribution of ion-implanted impurities, for artifacts in sputter depth profiling techniques, and for modifications of the properties of the first walls in TOKAMAK-typplaes ma reactors. In this review we attempt to systematically introduce the reader to this exciting and rapidly expanding subject; we emphasize the relevant experimental results to date and summarize the present theoretical understanding.

Additional Information

© 1983 Annual Reviews Inc. Published August 1983. The authors would like to acknowledge the many helpful suggestions of their colleagues in the Material Science Laboratory of Texas Instruments, Incorporated, and at the California Institute of Technology. We especially. acknowledge helpful discussions with Dr. R. J. Gaboriaud of Laboratoire de Metallurgie physique, Poitier, France, and Dr. B. M. Paine of the California Institute of Technology. This work was executed under the benevolent U.R. fund of the Boehmische Physical Society (B. M. Ullrich) and was financially supported in part by the United States Department of Energy through an agreement with the National Aeronautics and Space Administration, monitored by the Jet Propulsion Laboratory, California Institute of Technology (D. B. Bickler).

Additional details

Identifiers

Eprint ID
32425
DOI
10.1146/annurev.ms.13.080183.002011
Resolver ID
CaltechAUTHORS:20120713-112400215

Related works

Funding

Boehmische Physical Society
Department of Energy (DOE)
NASA/JPL/Caltech

Dates

Created
2012-07-13
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Updated
2021-11-09
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