CaltechAUTHORS
Published January 2017 | Version public
Book Section - Chapter Metadata-only

Applications of gallium nitride in MEMS and acoustic microsystems

Creators

Abstract

This paper covers various sensors and microsystems based on gallium nitride (GaN) micro mechanical (acoustic) resonators. III-nitrides have been a subject of extensive research for power electronics as well as photonics applications but their use in micro-electromechanical systems (MEMS) has been limited. In this paper, basic material properties of this group of materials (GaN, AlGaN, and other III-nitrides) are discussed and their current and future applications in MEMS and Microwave circuits are detailed.

Additional Information

© 2017 IEEE. Date Added to IEEE Xplore: 09 March 2017. This work is supported by the ONR under the Young Investigator Program.

Additional details

Identifiers

Eprint ID
78694
DOI
10.1109/SIRF.2017.7874356
Resolver ID
CaltechAUTHORS:20170629-121707529

Funding

Office of Naval Research (ONR)

Dates

Created
2017-06-30
Created from EPrint's datestamp field
Updated
2021-11-15
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