The formation of clusters during large sputtering events

We present the results of simulations of cluster formation during Ar^+ → In-Ga (liquid) sputtering events. We find that the indium concentration in small k-atom clusters (k ≤ 4) reflects the concentration in the target at the depth from which the clusters were sputtered. We find a strong correlation between the production of clusters and the size of the events responsible for their production. A simple model for the recombination of uncorrelated emissions into small clusters accurately predicts the production of small k-clusters during events of size N to be Y_k(N) ∼ N_k. However, this uncorrelated recombination model does not predict the proper energy spectra for clusters nor does it predict the oft experimentally observed power law decay of the yield of clusters. We discuss how a model for the recombination of correlated emissions may more readily explain these features.