Published October 1998
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Two-dimensional photonic crystals for GaN-based blue light emitters
Abstract
We successfully fabricated two-dimensional photonic crystal structures for III-nitride light emitters by integrating electron-beam lithography, xenon/chlorine-based chemically assisted ion beam etching and a multilayer pattern transfer.
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© 1998 IEEE.Attached Files
Published - 00734200.pdf
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00734200.pdf
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