CaltechAUTHORS
Published 2000 | Version public
Book Section - Chapter Metadata-only

Chemical vapor deposition membranes

Creators

  • 1. ROR icon University of Massachusetts Amherst
  • 2. ROR icon California Institute of Technology

Contributors

Abstract

This chapter is divided into four sections the first of which treats issues of general relevance to Chemical Vapor Deposition (CVD) of membranes, the second reviews work on dense silica membranes, the third is devoted to Y_2O_3-stabilized ZrO_2 (YSZ) membranes, and the fourth treats CVD of Pd membranes.

Additional Information

© 2000 Elsevier.

Additional details

Identifiers

Eprint ID
60826
DOI
10.1016/S0927-5193(00)80017-0
Resolver ID
CaltechAUTHORS:20151006-150212735

Dates

Created
2015-10-13
Created from EPrint's datestamp field
Updated
2021-11-10
Created from EPrint's last_modified field

Caltech Custom Metadata

Series Name
Membrane Science and Technology
Series Volume or Issue Number
6