CaltechAUTHORS
Published July 15, 2020 | Version public
Journal Article Metadata-only

Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

Creators

Abstract

Femtosecond-laser-induced two-photon polymerization has distinct advantages in micro-nanofabrication due to its intrinsic three-dimensional processing capability and high precision with sub-100 nanometer fabrication resolution. However, the high resolution causes a drawback in fabricating large-scale structures due to unacceptably long processing times. To solve this problem, we applied the patterned focus as the basic element for scanning processing. Theoretically, the relationship between patterned-focus scanning parameters and the uniformity of scanned light field was analyzed and optimized. Experimentally, we quantitatively investigated the relationship between the microstructure surface quality and the parameters of patterned-focus scanning. Based on above, we put forward a hybrid method that combines the femtosecond laser patterned exposure with direct-writing fabrication to rapidly fabricate large-scale microfluidic devices for various practical applications.

Additional Information

© 2020 Optical Society of America. Received 7 May 2020; revised 1 June 2020; accepted 1 June 2020; posted 8 June 2020 (Doc. ID 397078); published 10 July 2020. We acknowledge the Experimental Center of Engineering and Materials Sciences at USTC for the fabrication and measurement of the samples. This work was partly carried out at the USTC Center for Micro and Nanoscale Research and Fabrication. Funding: National Key Research and Development Program of China (2018YFB1105400); National Natural Science Foundation of China (11801126, 51675503, 51805509, 51875544, 61805230); the Aeronautical Science Fund (2018ZE78004); Fundamental Research Funds for the Central Universities (JZ2019YYPY0024, WK2090000011, WK2090000013, WK603000103, WK603000131); Youth Innovation Promotion Association of the Chinese Academy of Sciences (2017495); Foundation of Equipment Development Department (62209140 10901). Disclosures: The authors declare no conflicts of interest.

Additional details

Identifiers

Eprint ID
104951
Resolver ID
CaltechAUTHORS:20200813-094025869

Funding

National Basic Research Program of China
2018YFB1105400
National Natural Science Foundation of China
11801126
National Natural Science Foundation of China
51675503
National Natural Science Foundation of China
51805509
National Natural Science Foundation of China
51875544
National Natural Science Foundation of China
61805230
Chinese Aeronautical Establishment
2018ZE78004
Fundamental Research Funds for the Central Universities
JZ2019YYPY0024
Fundamental Research Funds for the Central Universities
WK2090000011
Fundamental Research Funds for the Central Universities
WK2090000013
Fundamental Research Funds for the Central Universities
WK603000103
Fundamental Research Funds for the Central Universities
WK603000131
Youth Innovation Promotion Association of the Chinese Academy of Sciences
2017495
Foundation of Equipment Development Department
62209140 10901

Dates

Created
2020-08-13
Created from EPrint's datestamp field
Updated
2021-11-16
Created from EPrint's last_modified field