CaltechAUTHORS
Published May 2020 | Version Published
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High-Q suspended optical resonators in 3C-SiC obtained by thermal annealing

Creators

Abstract

We fabricate suspended single-mode optical waveguides and ring resonators in 3C-SiC that operate at telecommunication wavelength, leverage post-fabrication thermal annealing to minimize optical propagation losses and demonstrate Q of over 41,000.

Additional Information

© 2020 The Author(s). This work was carried out at the Harvard Center for Nanoscale Systems (CNS), a member of the National Nanotechnology Infrastructure Network (NNIN).

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Identifiers

Eprint ID
105560
Resolver ID
CaltechAUTHORS:20200925-133309823

Related works

Describes
https://resolver.caltech.edu/CaltechAUTHORS:20200409-115739017 (URL)
Is published in
https://ieeexplore.ieee.org/abstract/document/9193222 (URL)

Dates

Created
2020-09-25
Created from EPrint's datestamp field
Updated
2021-11-16
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