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Published September 2010 | Version Published
Journal Article Open

Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

Creators

  • 1. ROR icon Cornell University

Abstract

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent.

Additional Information

© 2010 American Vacuum Society. Received 4 June 2010; accepted 20 July 2010; published 3 September 2010. This material is based on the work supported as part of the Energy Materials Center at Cornell (EMC2), an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award No. DE-SC0001086. This work is based on the research conducted at the Cornell High Energy Synchrotron Source (CHESS), which is supported by the National Science Foundation and the National Institutes of Health/National Institute of General Medical Sciences under NSF Award No. DMR-0225180.

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Additional details

Identifiers

PMCID
PMC4043122
Eprint ID
102390
Resolver ID
CaltechAUTHORS:20200407-132649138

Funding

Department of Energy (DOE)
DE-SC0001086
NIH
NSF
DMR-0225180

Dates

Created
2020-04-07
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Updated
2021-11-16
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