Diffractive lens fabrication by replica molding

Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.