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Published 2007 | Version Published
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Diamagnetically Levitated MEMS Accelerometers

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Abstract

We introduce the theory and a proof-of-concept design for MEMS-based, diamagnetically-levitated accelerometers. The theory includes an equation for determining the diamagnetic force above a checkerboard configuration of magnets. We demonstrate both electronic probing and a rapid MEMS-based interferometer technique for position sensing of the proof mass. Through a proof-of-concept design, we show electrostatic-measurement sensitivity achieving 34 μg at a 0.1 V sense signal and interferometer-measurement sensitivity achieving 6 μg for in-plane vibrations at 5 Hz. We conclude by outlining batch-fabrication steps to produce levitated accelerometers.

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© 2007 IEEE.

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59107
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CaltechAUTHORS:20150731-110120088

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2015-08-06
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2021-11-10
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