Frequency fluctuations in silicon nanoresonators
Creators
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1.
Grenoble Alpes University
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2.
CEA LETI
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3.
California Institute of Technology
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4.
Indian Institute of Science Bangalore
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5.
École Polytechnique Fédérale de Lausanne
Abstract
Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequency response, these fluctuations have recently attracted considerable theoretical interest. However, their existence is very difficult to demonstrate experimentally. Here, through a literature review, we show that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise. We studied a monocrystalline silicon nanoresonator at room temperature and found a similar discrepancy. We propose a new method to show that this was due to the presence of frequency fluctuations, of unexpected level. The fluctuations were not due to the instrumentation system, or to any other of the known sources investigated. These results challenge our current understanding of frequency fluctuations and call for a change in practices.
Additional Information
© 2016 Macmillan Publishers Limited. Received 09 July 2015; Accepted 25 January 2016; Published online 29 February 2016. The authors acknowledge partial support from the LETI Carnot Institute NEMS-MS project, as well as from the European Union through the ERC Enlightened project (616251) and the Marie-Curie Eurotalents outgoing (S.H.) and incoming (M.S.) fellowships. The authors thank C. Marcoux and C. Dupré for their support with device fabrication. L.G.V. acknowledges financial support from the Swiss National Science Foundation (PP00P2-144695) and the European Commission (PCIG14-GA-2013-631801). A.K.N. acknowledges financial support from the Indian Institute of Science, Bangalore. Author contributions: M.S. performed all experiments and processed the data. M.S., G.J., A.K.N. and S.H. conceived and designed the experiments. L.G.V. and S.H. performed the literature review. M.G. fabricated the devices and performed all SEM observations. M.S., G.J. and S.H. co-wrote the paper. All authors commented on the manuscript. The authors declare no competing financial interests.Attached Files
Accepted Version - emss-66923.pdf
Submitted - 1506.08135.pdf
Supplemental Material - nnano.2016.19-s1.pdf
Files
1506.08135.pdf
Additional details
Identifiers
- PMCID
- PMC4892353
- Eprint ID
- 65095
- DOI
- 10.1038/NNANO.2016.19
- Resolver ID
- CaltechAUTHORS:20160307-081630639
Related works
- Describes
- 10.1038/NNANO.2016.19 (DOI)
- https://arxiv.org/abs/1506.08135 (URL)
Funding
- LETI Carnot Institute
- European Research Council (ERC)
- 616251
- Marie Curie Fellowship
- Swiss National Science Foundation (SNSF)
- PP00P2-144695
- European Research Council (ERC)
- PCIG14-GA-2013-631801
- Indian Institute of Science
Dates
- Created
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2016-03-08Created from EPrint's datestamp field
- Updated
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2022-05-06Created from EPrint's last_modified field
Caltech Custom Metadata
- Caltech groups
- Physics Department