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Published July 2012 | Version public
Book Section - Chapter Metadata-only

Silicon photonic components for integrated optical systems

Creators

  • 1. ROR icon California Institute of Technology

Abstract

We show that the properties of silicon can be changed profoundly when nanofabricated to below 5nm, resulting in larger bandgap emission and more efficient light generation. Moreover, three-dimensional nanostructures can be fabricated at these nanoscale dimensions by dynamic control over the dry etching process.

Additional Information

© 2012 IEEE. Support from the NSF through the CIAN is gratefully acknowledged.

Additional details

Identifiers

Eprint ID
74137
DOI
10.1109/OECC.2012.6276676
Resolver ID
CaltechAUTHORS:20170207-171906236

Funding

NSF

Dates

Created
2017-02-08
Created from EPrint's datestamp field
Updated
2021-11-11
Created from EPrint's last_modified field

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Caltech groups
Physics Department