A low-kiloelectronvolt focused ion beam strategy for processing low-thermal-conductance materials with nanoampere currents
Creators
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1.
California Institute of Technology
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2.
Helmholtz-Zentrum Dresden-Rossendorf
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3.
SLAC National Accelerator Laboratory
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4.
University of Queensland
- 5. Affiliated Stomatological Hospital of Xiamen Medical College, Fujian, China
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6.
Griffith University
Abstract
Ion beam-induced heat damage in thermally low conductive specimens such as biological samples is gaining increased interest within the scientific community. This is partly due to the increased use of FIB-SEMs in biology as well as the development of complex materials, such as polymers, which need to be analyzed. The work presented here looks at the physics behind the ion beam–sample interactions and the effect of the incident ion energy (set by the acceleration voltage) on inducing increases in sample temperature and potential heat damage in thermally low conductive materials such as polymers and biological samples. The ion beam-induced heat for different ion beam currents at low acceleration voltages is calculated using Fourier's law of heat transfer, finite element simulations, and numerical modelling results and compared to experiments. The results indicate that with lower accelerator voltages, higher ion beam currents in the nanoampere range can be used to pattern or image soft material and non-resin-embedded biological samples with increased milling speed but reduced heat damage.
Copyright and License
© 2024 Wolff et al.; licensee Beilstein-Institut.
This is an open access article licensed under the terms of the Beilstein-Institut Open Access License Agreement (https://www.beilstein-journals.org/bjnano/terms), which is identical to the Creative Commons Attribution 4.0 International License (https://creativecommons.org/licenses/by/4.0). The reuse of material under this license requires that the author(s), source and license are credited. Third-party material in this article could be subject to other licenses (typically indicated in the credit line), and in this case, users are required to obtain permission from the license holder to reuse the material.
Acknowledgement
The authors acknowledge the facilities and the scientific and technical assistance of Dr. Jamie Riches, Rachel Hancock, and Ning Liu, of the Central Analytical Research Facility operated by the Institute for Future Environments at the Queensland University of Technology. The authors thank Ms. Yong Y. Peng and Dr. John A.M. Ramshaw for providing the collagen sample. The Monte Carlo simulations were performed using the software SRIM by J. Ziegler (http://srim.org). William Thompson would like to thank Chris Boucher of COMSOL for his exceptional modelling support.
Contributions
Annalena Wolff: conceptualization; data curation; formal analysis; investigation; methodology; project administration; supervision; visualization; writing – original draft. Nico Klingner: conceptualization; data curation; formal analysis; investigation; methodology; software; validation; visualization; writing – original draft; writing – review & editing. William Thompson: conceptualization; data curation; formal analysis; investigation; writing – review & editing. Yinghong Zhou: resources; validation; writing – review & editing. Jinying Lin: resources; writing – review & editing. Yin Xiao: resources; validation; writing – review & editing.
Additional Information
This article is part of the thematic issue "Focused ion and electron beams for synthesis and characterization of nanomaterials".
Files
2190-4286-15-97.pdf
Additional details
Related works
- Is part of
- Journal Issue: https://www.beilstein-journals.org/bjnano/series/103 (URL)
Dates
- Accepted
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2024-09-03Accepted
- Available
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2024-09-27Published online
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- Publication Status
- Published