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Published March 8, 1996 | Version Published
Book Section - Chapter Open

Magnetically actuated MEMS scanning mirror

Creators

  • 1. ROR icon California Institute of Technology

Contributors

Abstract

A 4 mm by 5 mm, magnetically actuated scanning MEMS mirror is fabricated by integration of bulk silicon micromachining and magnetic thin film head techniques. Large mirror deflection angles (0 - 70 degree(s)) are achieved. The MEMS mirror is demonstrated as a laser beam scanner in both conventional and compact holographic data storage system configurations.

Additional Information

© 1996 Society of Photo-Optical Instrumentation Engineers (SPIE).

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Eprint ID
88274
Resolver ID
CaltechAUTHORS:20180725-160850964

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2018-07-30
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2021-11-16
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Series Name
Proceedings of SPIE
Series Volume or Issue Number
2687