CaltechAUTHORS
Published June 27, 2011 | Version public
Journal Article Metadata-only

Growth of Compositionally Graded BST by Metal Organic Chemical Vapor Deposition

Creators

  • 1. ROR icon California Institute of Technology
  • 2. ROR icon United States Army Research Laboratory

Abstract

We report the growth of a compositionally stratified Ba_xSr1_(-x)TiO_3 (BST) thin film on MgO by metal organic chemical vapor deposition (MOCVD). Real-time control of the precursor flux based on UV absorption spectroscopy was used to systematically vary the ratio of Ba:Sr during deposition. The composition of the film with depth was measured by Rutherford backscattering spectroscopy, and x was found to decrease from 0.87 at the film-air interface to 0.43 near the film-MgO interface.

Additional Information

© 2011 Taylor & Francis Group, LLC. Received January 3, 2011. Available online June 27, 2011. This work has been generously supported by the Army Research Office award # W911NF-07-1-0359.

Additional details

Identifiers

Eprint ID
28419
Resolver ID
CaltechAUTHORS:20111212-104658135

Funding

Army Research Office (ARO)
W911NF-07-1-0359

Dates

Created
2011-12-12
Created from EPrint's datestamp field
Updated
2021-11-09
Created from EPrint's last_modified field