CaltechAUTHORS
Published July 21, 2009 | Version Submitted + Published
Patent Open

MEMS-based, phase-shifting interferometer

Creators

Abstract

Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.

Additional Information

Publication number US7564559 B2. Publication type Grant. Application number US 11/446,552. Publication date Jul 21, 2009. Application publication date Dec 6, 2007 Filing date Jun 2, 2006. Priority date Jun 2, 2006. Government interests: The invention was funded in part by Grant Nos. EIA-0122599 awarded by the National Science Foundation and by Grant No. EEC-0318642 awarded by the National Science Foundation. The government may have certain rights in the invention.

Attached Files

Published - US7564559.pdf

Submitted - US20070279638.pdf

Files

US20070279638.pdf

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Additional details

Identifiers

Eprint ID
61863
Resolver ID
CaltechAUTHORS:20151104-160949584

Related works

Describes
https://www.google.com/patents/US7564559 (URL)
http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=7,564,559.PN.&OS=PN/7,564,559&RS=PN/7,564,559 (URL)
http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=7564559B2&KC=B2&FT=D (URL)

Funding

NSF
EIA-0122599
NSF
EEC-0318642

Dates

Created
2015-11-05
Created from EPrint's datestamp field
Updated
2019-10-03
Created from EPrint's last_modified field