Published August 15, 2001
| Version Published
Journal Article
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Electron cross section set for CHF_3
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1.
Kinema Research & Software
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2.
California Institute of Technology
Abstract
We describe the development of a consistent set of low-energy electron collision cross sections for trifluoromethane, CHF_3. First-principles calculations are used to obtain key elastic and inelastic cross sections. These are combined with literature values of the ionization cross section and with vibrational excitation cross sections obtained from the Born approximation to form a preliminary set, which is then adjusted to achieve consistency with measured swarm parameters.
Additional Information
© 2001 American Institute of Physics. (Received 2 February 2001; accepted for publication 7 May 2001) This research was supported by Sematech, Inc. Work at Caltech was also supported by the Office of Basic Energy Sciences of the Department of Energy and by an equipment grant from Intel Corp. Calculations reported here made use of the facilities of the Caltech Center for Advanced Computing Research and of the Jet Propulsion Laboratory's Supercomputing Project. The authors would like to thank Dr. Sadasivan Shankar of Intel Corp. for useful discussions and for his interest throughout the course of this work.Attached Files
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Additional details
Additional titles
- Alternative title
- Electron cross section set for CHF3
Identifiers
- Eprint ID
- 61607
- Resolver ID
- CaltechAUTHORS:20151027-154129341
Funding
- Sematech, Inc.
- Department of Energy (DOE)
- Intel
Dates
- Created
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2015-10-28Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field