Published January 30, 2002
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Multilayer coating facility for the HEFT hard x-ray telescope
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1.
Technical University of Denmark
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2.
California Institute of Technology
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3.
European Synchrotron Radiation Facility
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Abstract
A planar magnetron sputtering facility has been established at the Danish Space Research Institute (DSRI) for the production coating of depth graded multilayers on the thermally slumped glass segments which form the basis for the hard X-ray telescope on the HEFT balloon project. The facility is capable of coating 20-45 mirrors segments in each run. The coatings are optimized W/Si coatings. The paper describes the facility, the results of the calibration and presents data for the X-ray testing of flight mirrors.
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© 2002 Society of Photo-Optical Instrumentation Engineers (SPIE).Attached Files
Published - 104.pdf
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104.pdf
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- 91806
- Resolver ID
- CaltechAUTHORS:20181213-143632127
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2018-12-19Created from EPrint's datestamp field
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2021-11-16Created from EPrint's last_modified field
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- Proceedings of SPIE
- Series Volume or Issue Number
- 4496