Published February 13, 2018
| Version Submitted
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Stacked Wafer Gradient Index Silicon Optics with Integral Anti-reflection Layers
Abstract
Silicon optics with wide bandwidth anti-reflection (AR) coatings, made of multi-layer textured silicon surfaces, are developed for millimeter and submillimeter wavelengths. Single and double layer AR coatings were designed for an optimal transmission centered on 250 GHz, and fabricated using the DRIE (Deep Reaction Ion Etching) technique. Tests of high resistivity silicon wafers with single-layer coatings between 75 GHz and 330 GHz are presented and compared with the simulations.
Additional Information
This work was funded by NASA (Grant NNX15AE01G).Attached Files
Submitted - 1802.04854.pdf
Files
1802.04854.pdf
Additional details
Identifiers
- Eprint ID
- 92106
- Resolver ID
- CaltechAUTHORS:20190107-095816933
Related works
- Describes
- https://arxiv.org/abs/1802.04854 (URL)
Funding
- NASA
- NNX15AE01G
Dates
- Created
-
2019-01-07Created from EPrint's datestamp field
- Updated
-
2023-06-02Created from EPrint's last_modified field
Caltech Custom Metadata
- Caltech groups
- Astronomy Department